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Nikon NSR-2205 i11D尼康二手翻新光刻机
专业翻新改造Nikon/尼康光刻机，现货供应Nikon NSR 1755 i7A/B/C，
Nikon NSR 2005 i8/i9/i10/i10C/i11/i11D，Nikon NSR 2205 i10C/i11C
/i11D/i12/i12D/i14/i14E/EX 12B/EX 14/EX 14C，Nikon NSR S203B/S204B
/S205C/S206/S206D/S609/S609B，Nikon NSR SF 100/SF 110/SF 120
/SF 130等各种型号光刻机，欢迎来电咨询。
产品描述
Resolution：≦ 350 nm
NA：0.63
Exposure light source：i-line (365 nm wavelength)
Reduction ratio：1:5
Exposure field：22 mm square to 17.9 (H) × 25.2 (V) mm
Alignment accuracy (EGA, |M| + 3σ)：≦ 70 nm
Alignment system：LSA (standard), FIA (optional), LIA (optional)
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