Nikon NSR-SF150尼康二手翻新光刻机
专业翻新改造Nikon/尼康光刻机,现货供应Nikon NSR 1755 i7A/B/C,
Nikon NSR 2005 i8/i9/i10/i10C/i11/i11D,Nikon NSR 2205 i10C/i11C
/i11D/i12/i12D/i14/i14E/EX 12B/EX 14/EX 14C,Nikon NSR S203B/S204B
/S205C/S206/S206D/S609/S609B,Nikon NSR SF 100/SF 110/SF 120
/SF 130等各种型号光刻机,欢迎来电咨询。
产品描述
Resolution |
≦ 280 nm |
NA |
0.62 |
Exposure light source |
i-line (365 nm wavelength) |
Reduction ratio |
1:4 |
Exposure field |
26 × 33 mm |
Alignment accuracy |
≦ 25 nm |
Throughput |
≧ 180 wafers/hour (300 mm wafer, 76 shots) |