0769-2223 1935
联系电话: 0769-2223 1935
联系地址: 广东省东莞市长安镇长安东门中路82号2011室

微信公众号

Canon FPA-3000 i5佳能二手翻新光刻机


专业翻新改造Canon/佳能光刻机,现货供应Canon  FPA 2500 i2/i3,Canon  FPA 3000 EX4/i4/i5/i5+/IW/EX6,Canon FPA 5000 ES3,Canon FPA 5500 IZA,Canon FPA 6000 AS4/ES5,Canon FPA 6300ESW/ES6a,Canon FPA-3030系列等各种型号光刻机,欢迎来电咨询。

联系我们

产品描述

Configuration

Wafer: 6" or 8" (for other size, please inquire)

Reticle: 6"

General Specification and Information:

Model: FPA 3000 i5

First year available: 1996

Lens Type: UL34-II

Stage Type: FLAT

Chamber Type: CD83

Projection Optics

Projection Magnification: 1/5 X

Exposure Light: 365nm

Numerical Aperture: .45 -.63

Field Size: 22x22 (or 17x26)

Standard Illumination

Light Source: 2.0KW Super High Pressure Hg Lamp

Intensity: 8000 W/m2

Uniformity: < 1.0%

Focus/Leveling Repeatability: <0.10µm (3sigma)

Standard Performance

Resolution: <0.35µm

Depth of Focus: >1.0µm

Image Field Deviation: <.3µm

Distortion: <±0.035µm

Standard Stage Specification

Step Accuracy: <0.03µm (3sigma)

Scaling: <±0.5ppm

Orthogonality: <±0.5ppm

Standard Alignment Specification:

Reticle Rotation Accuracy: <±0.01µm

Wafer Alignment: <0.04µm mean + 3sigma

Reticle Rotation Repeatability: <0.02µm)

Standard Leveling

Leveling Repeatability: <7ppm (3sigma)

Minimum Compensation Range: >100ppm

Reticle: Standard Size 6" square t=0.25" ( Patticle checker)

Wafer Size: Standard 8” ( 6” thru 8” SEMI Standard, Notch / Flat )

Throughput: 74wph (60 shot)90mj/cm ( 8” Wafer)

Chamber Specifications

Chamber Type: CD83

Air Conditioner: Y75-4105-000

Refrigerant: R22

Gram (g): 5000

Pounds (lbs): 11.02

产品推荐

ASML PAS 5500 850C二手翻新光刻机

ASML PAS 5500 850C二手翻新光刻机

Nikon NSR-S204B尼康二手翻新光刻机

Nikon NSR-S204B尼康二手翻新光刻机

AMAT CENTURA DPS II POLY MESA应用材料二手翻新刻蚀设备

AMAT CENTURA DPS II POLY MESA应用材料二手翻新刻蚀设备

TEL ACT8 /ACT12二手翻新全自动涂胶显影系设备

TEL ACT8 /ACT12二手翻新全自动涂胶显影系设备